2024 External Rates - hourly unless specified otherwise. For UA Internal rates, view the equipment page via iLab (Nano Fabrication Center)
| Service | External (non-UA) |
| Lithography Mask Aligner | $85 |
| YES Vapor Prime | $33 |
| Laurell Spin Coater | $46 |
| Parylene Coater | $160 |
| PVD Evaporation | $95 |
| PVD Sputtering | $95 |
| Oxidation/Anneal Furnace | $85 |
| Plasma Clean | $51 |
| Plasma Etch | $82-$160 |
| LPCVD Nitride Deposition | $275 |
| LPCVD Oxide Deposition | $275 |
| Atomic Layer Deposition | $160 |
| Dicing Diamond Saw | $180 |
| Wet Bench/Clean/Etch/Hood | $110 |
| Optical Profilometry | $35 |
| Profiler KLA Tencor P-15 | $70 |
| Reflectometry | $35-$75 |
| Four Point Probe | $35-$85 |
| UV-Vis-NIR | $85 |
| Scanning Raman Microscopy | $100 |
| Contact Angle Goniometer | $85 |
| X-Ray CT | $350 |
| Ellipsometry | $100 |
If you have any questions please contact Facility Manager, Dr. Greg Book at book@email.arizona.edu